Semiconductor

Challenges

High Cleanroom Requirements:

Traditional manual handling poses contamination risks.

High Stability for Valuable Materials:

Wafers/chips are easily damaged, requiring high precision and stability.

Flexible Production Needs:

Complex processes, multiple material flows, flexible handling demands.

Cross-Zone Collaboration:

Material transfer across floors, coordinated with elevators/air showers.

Solution

Robots combine VSLAM texture recognition & laser positioning, with IOT elevator control for cross-floor automated handling, fully enclosed cleanroom operation suitable for high-precision, high-stability handling needs in cleanrooms, ensuring efficient, safe logistics operation.

Cross-floor Automated Handling
Enclosed Cleanroom Operation
Ensures Efficient, Safe Logistics Operation

iBen X Series Transport Robots

X300

Core Advantages

High-Precision Navigation:

Dual SLAM fusion, millimeter-level path planning, precise trajectory control ensures handling stability.

Smart Obstacle Avoidance:

Visual + laser environmental perception, dynamic path adjustment ensures safe handling.

Cleanroom Adaptation:

Non-contact autonomous charging, no environmental modification, meets cleanroom requirements.

IOT Integration:

Supports linkage with cleanroom door controls, lifting platforms, and other systems to enable automated material handling.